Autori: Goto T
| Naslov | Functional separation in two frequency operation of an inductively coupled plasma (Article) |
| Autori | Denda T Miyoshi Y Komukai Y Goto T Petrovic Zoran Lj  Makabe Toshiaki
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| Info | JOURNAL OF APPLIED PHYSICS, (2004), vol. 95 br. 3, str. 870-876 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
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