Autori: Makabe Toshiaki
| Naslov | Negative mobilities of electrons in radio frequency fields (Article) |
| Autori | Dujko Sasa  Raspopovic Zoran M Petrovic Zoran Lj Makabe Toshiaki
|
| Info | IEEE TRANSACTIONS ON PLASMA SCIENCE, (2003), vol. 31 br. 4, str. 711-716 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
     |
| Naslov | Development of optical computerized tomography in capacitively coupled plasmas and inductively coupled plasmas for plasma etching (Article) |
| Autori | Makabe Toshiaki Petrovic Zoran Lj
|
| Info | APPLIED SURFACE SCIENCE, (2002), vol. 192 br. 1-4, str. 88-114 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Kinetic phenomena in electron transport in radio-frequency fields (Article) |
| Autori | Petrovic Zoran Lj Raspopovic Zoran M Dujko Sasa Makabe Toshiaki
|
| Info | APPLIED SURFACE SCIENCE, (2002), vol. 192 br. 1-4, str. 1-25 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography (Article) |
| Autori | Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki
|
| Info | IEEE TRANSACTIONS ON PLASMA SCIENCE, (2002), vol. 30 br. 1, str. 130-131 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures (Article) |
| Autori | Miyoshi Y Petrovic Zoran Lj Makabe Toshiaki
|
| Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2002), vol. 35 br. 5, str. 454-461 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Optical emission spectroscopy of pulsed inductively coupled plasma in Ar (Article) |
| Autori | Hioki K Itazu N Petrovic Zoran Lj Makabe Toshiaki
|
| Info | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, (2001), vol. 40 br. 11A, str. L1183-L1186 |
| Ispravka | Web of Science Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis (Article) |
| Autori | Kurihara M Petrovic Zoran Lj Makabe Toshiaki
|
| Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2000), vol. 33 br. 17, str. 2146-2153 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma (Article) |
| Autori | Kitajima T Takeo Y Petrovic Zoran Lj Makabe Toshiaki
|
| Info | APPLIED PHYSICS LETTERS, (2000), vol. 77 br. 4, str. 489-491 |
| Ispravka | Web of Science Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Diffusion of electrons in time-dependent E(t) x B(t) fields (Article) |
| Autori | Raspopovic Zoran M Sakadzic S Petrovic Zoran Lj Makabe Toshiaki
|
| Info | JOURNAL OF PHYSICS D-APPLIED PHYSICS, (2000), vol. 33 br. 11, str. 1298-1302 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
| Naslov | Diagnostics of an inductively coupled CF4/Ar plasma (Article) |
| Autori | Hioki K Hirata H Matsumura S Petrovic Zoran Lj Makabe Toshiaki
|
| Info | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (2000), vol. 18 br. 3, str. 864-872 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
|
|
