Autori: Matsumura S
| Naslov | Diagnostics of an inductively coupled CF4/Ar plasma (Article) |
| Autori | Hioki K Hirata H Matsumura S Petrovic Zoran Lj  Makabe Toshiaki
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| Info | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (2000), vol. 18 br. 3, str. 864-872 |
| Ispravka | Web of Science Članak Elečas Rang časopisa Citati: Web of Science Scopus |
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