Autori: Takeo Y
| Naslov | Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma (Article) |
| Autori | Kitajima T Takeo Y Petrovic Zoran Lj  Makabe Toshiaki
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| Info | APPLIED PHYSICS LETTERS, (2000), vol. 77 br. 4, str. 489-491 |
| Ispravka | Web of Science Elečas Rang časopisa Citati: Web of Science Scopus |
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